Micromechatronics and MEMS
Field of study:
Mechatronics
Programme: common
Semester: I
ECTS credits: 3
Course instructor:
dr inż. Grzegorz Dziatkiewicz,
mgr inż. Waldemar Mucha
Course description
If you would like to know the difference between M&M’s® and MEMS this
course is for you
J!
During course “Micromechatronics and MEMS” you will learn the basics of
modeling of MEMS. You will know not only how to apply the scaling laws
in the design process, but also why larger potatoes are peeled fasterJ. The
models of microaccelerometers, piezoresisitive, capacitive and
piezoelectric sensors and electrostatic microactuators will be presented
and you will be able to use them in a professional manner as a designer
of MEMS products. The real design problems during labs will be solved
and you will apply MATLAB® to perform engineering calculations. Real
data and real design problems of modern contemporary mechatronic
products will be solved in an engineering way with the use of basic
knowledge in the area of mechanics, mechanical and electrical
engineering and basic numerical methods. Simple but robust and easy to
use models will be the basis for more advanced design methods,
especially for students of the programmes “Modelling and simulation of
mechatronic systems” (ME3) and “Mechatronic systems engineering” (ME8).
Teaching modes and
hours
Sources
- Pons J.L., Emerging
actuator technologies: a micromechatronic approach. John
Wiley&Sons, 2005.
- Uchino K., Giniewicz
J.R., Micromechatronics. CRC Press, 2003.
- Senturia S.D.,
Microsystem design. Springer, 2004.
- Lobontiu N., Garcia
E., Mechanics of microelectromechanical systems. Kluwer,
2005.
- Beeby S. et al., MEMS
mechanical sensors. Artech House Publishers, 2004.
- Takahata K., Micro
electronic and mechanical systems. In-Tech, 2009.
- Lyshevski S.E., Nano-
and microelectromechanical systems. CRC Press, 2001.
- Maluf N., Williams K.,
An introduction to microelectromechanical systems
engineering. Artech House Publishers, 2004.
|